Sputtering Targets

Sputtering Targets

Sputter targets are prepared either by a melt- or a powder metallurgical process.

Various geometric shapes are possible.

Metals
Aluminium Chromium Lead Platinum Tantalum
Antimony Cobalt Lithium Potassium Tellurium
Barium Gallium Magnesium Rhenium Tin
Beryllium Germanium Manganese Rhodium Titanium
Bismuth Gold Molybdenum Rubidium Tungsten
Boron Hafnium Niobium Ruthenium Vanadium
Cadmium Indium Nickel Selenium Zinc
Calcium Iridium Osmium Silicon Zirkonium
Carbon Iron Palladium Strontium
Rare Earth
Cerium Gadolinium Neodymium Terbium Various Rare
Dysprosium Holmium Praseodymium Thulium Earth alloys
Erbium Lutetium Samarium Ytterbium
Europium Lanthanum Scandium Yttrium
Alloys
Al/B Au/Pd Co/Ni Ge/Si Pt/Ru
Al/Cu Au/Pt Co/Ta/Zr Ge/Te Pt/Ag
Al/Cu/Si Au/Sn Cr/SiO2Cermet In/Sn Sb/In
Al/Cr Au/Zn Cu/Al Ir/Mn Sb/In/Sn
Al/Li Bi/Sb Cu/Cr Ni/Cr Si/Al
Al/Mg Bi/Sb/Se Cu/Ga Ni/Fe Si/Cr
Al/Si Bi/Sb/Se/Te Cu/Ni Ni/Ti Ta/Ti
Al/Ti Bi/Sb/Te Cu/Sn Ni/V Ti/Al
Au/Sb Bi/Se Fe/Al/Si Ni/Zr Ti/W
Au/Ag Bi/Te Fe/Cr Os/Ru Ti/Zr
Au/B Cd/Te Fe/Mn Pb/Se W/Ti
Au/Be So/Cr Fe/Ru/Ga/Si Pb/Te Zn/Al
Au/Ge Co/Fe Fe/Si Pb/Se/Te Zr/Y
Au/Ir Co/Nb/Zr Fe/Si/B/C Pd/Pt and others
Oxides
Al2O3 CuO PbZrO3 Supercond. Y2O3
Sb2O3 HfO2 unstab. LiNbO3 SrO ZnO
BaTiO3 HfO2/CaO MgO SrTiO3 ZnO dop.
Bi2O3 HfO2/Y2O3 MoO3 SrZrO3 ZrO2 unstab.
Bi2TiO5 In2O3 Nb2O3 Ta2O5 ZrO2/CaO
Bi4Ti3O12 ITO Nb2O5 ThO2 ZrO2/Y2O3
BiTiO3 LaAlO3 RE2O3 SnO2
CeO2 La2O3 SiO2 TiO2
CrO3 PbTiO3 SiO WO3 and others
Borides
CrB2 Mo2B6 TiB2 VB2
HfB2 NbB2 Wb ZrB2
LaB6 TaB2 W2B and others
Carbides
B4C Mo2C TaC WC6%Co ZrC
Cr3C2 NbC TiC WC12%Co
HfC SiC WC VC and others
Fluorides
AlF3 CeF3 LiF RE/NaF YF3
BaF2 LaF3 MgF2 Na3AlF6
CaF2 PbF2 KF ThF4 and others
Nitrides
AlN HfN Si3N4 TiN ZrN
BN NbN TaN VN and others
Silicides
CrSi2 MoSi2 TaSi2 Ti5Si3 V3Si
Cr3Si NbSi2 Ta5Si3 WSi2 ZrSi2
HfSi2 PtSi TiSi2 VSi2 and others
Sulfides, Selenides, Tellurides
As2S3 PbS NbSe2 TaTe2 ZnS
CdSe PbTe Nb-S WSe2 ZnTe
CdSe MoSe2 NbTe2 WsS2
CdTe MoS2 TaSe2 WTe2
PbSe MoTe2 TaS2 ZnSe and others

Other materials available upon request.

We can also offer copper backing plates and bonding.

When asking for a quotation please inform about the desired size, purity, exact composition, geometrical shape and quantity.

 

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