Sputtering Targets
Sputter targets are prepared either by a melt- or a powder metallurgical process.
Various geometric shapes are possible.
| Metals |
| Aluminium |
Chromium |
Lead |
Platinum |
Tantalum |
| Antimony |
Cobalt |
Lithium |
Potassium |
Tellurium |
| Barium |
Gallium |
Magnesium |
Rhenium |
Tin |
| Beryllium |
Germanium |
Manganese |
Rhodium |
Titanium |
| Bismuth |
Gold |
Molybdenum |
Rubidium |
Tungsten |
| Boron |
Hafnium |
Niobium |
Ruthenium |
Vanadium |
| Cadmium |
Indium |
Nickel |
Selenium |
Zinc |
| Calcium |
Iridium |
Osmium |
Silicon |
Zirkonium |
| Carbon |
Iron |
Palladium |
Strontium |
|
| Rare Earth |
| Cerium |
Gadolinium |
Neodymium |
Terbium |
Various Rare |
| Dysprosium |
Holmium |
Praseodymium |
Thulium |
Earth alloys |
| Erbium |
Lutetium |
Samarium |
Ytterbium |
|
| Europium |
Lanthanum |
Scandium |
Yttrium |
|
| Alloys |
| Al/B |
Au/Pd |
Co/Ni |
Ge/Si |
Pt/Ru |
| Al/Cu |
Au/Pt |
Co/Ta/Zr |
Ge/Te |
Pt/Ag |
| Al/Cu/Si |
Au/Sn |
Cr/SiO2Cermet |
In/Sn |
Sb/In |
| Al/Cr |
Au/Zn |
Cu/Al |
Ir/Mn |
Sb/In/Sn |
| Al/Li |
Bi/Sb |
Cu/Cr |
Ni/Cr |
Si/Al |
| Al/Mg |
Bi/Sb/Se |
Cu/Ga |
Ni/Fe |
Si/Cr |
| Al/Si |
Bi/Sb/Se/Te |
Cu/Ni |
Ni/Ti |
Ta/Ti |
| Al/Ti |
Bi/Sb/Te |
Cu/Sn |
Ni/V |
Ti/Al |
| Au/Sb |
Bi/Se |
Fe/Al/Si |
Ni/Zr |
Ti/W |
| Au/Ag |
Bi/Te |
Fe/Cr |
Os/Ru |
Ti/Zr |
| Au/B |
Cd/Te |
Fe/Mn |
Pb/Se |
W/Ti |
| Au/Be |
So/Cr |
Fe/Ru/Ga/Si |
Pb/Te |
Zn/Al |
| Au/Ge |
Co/Fe |
Fe/Si |
Pb/Se/Te |
Zr/Y |
| Au/Ir |
Co/Nb/Zr |
Fe/Si/B/C |
Pd/Pt |
and others |
| Oxides |
| Al2O3 |
CuO |
PbZrO3 |
Supercond. |
Y2O3 |
| Sb2O3 |
HfO2 unstab. |
LiNbO3 |
SrO |
ZnO |
| BaTiO3 |
HfO2/CaO |
MgO |
SrTiO3 |
ZnO dop. |
| Bi2O3 |
HfO2/Y2O3 |
MoO3 |
SrZrO3 |
ZrO2 unstab. |
| Bi2TiO5 |
In2O3 |
Nb2O3 |
Ta2O5 |
ZrO2/CaO |
| Bi4Ti3O12 |
ITO |
Nb2O5 |
ThO2 |
ZrO2/Y2O3 |
| BiTiO3 |
LaAlO3 |
RE2O3 |
SnO2 |
|
| CeO2 |
La2O3 |
SiO2 |
TiO2 |
|
| CrO3 |
PbTiO3 |
SiO |
WO3 |
and others |
| Borides |
| CrB2 |
Mo2B6 |
TiB2 |
VB2 |
|
| HfB2 |
NbB2 |
Wb |
ZrB2 |
|
| LaB6 |
TaB2 |
W2B |
|
and others |
| Carbides |
| B4C |
Mo2C |
TaC |
WC6%Co |
ZrC |
| Cr3C2 |
NbC |
TiC |
WC12%Co |
|
| HfC |
SiC |
WC |
VC |
and others |
| Fluorides |
| AlF3 |
CeF3 |
LiF |
RE/NaF |
YF3 |
| BaF2 |
LaF3 |
MgF2 |
Na3AlF6 |
|
| CaF2 |
PbF2 |
KF |
ThF4 |
and others |
| Nitrides |
| AlN |
HfN |
Si3N4 |
TiN |
ZrN |
| BN |
NbN |
TaN |
VN |
and others |
| Silicides |
| CrSi2 |
MoSi2 |
TaSi2 |
Ti5Si3 |
V3Si |
| Cr3Si |
NbSi2 |
Ta5Si3 |
WSi2 |
ZrSi2 |
| HfSi2 |
PtSi |
TiSi2 |
VSi2 |
and others |
| Sulfides, Selenides, Tellurides |
| As2S3 |
PbS |
NbSe2 |
TaTe2 |
ZnS |
| CdSe |
PbTe |
Nb-S |
WSe2 |
ZnTe |
| CdSe |
MoSe2 |
NbTe2 |
WsS2 |
|
| CdTe |
MoS2 |
TaSe2 |
WTe2 |
|
| PbSe |
MoTe2 |
TaS2 |
ZnSe |
and others |
Other materials available upon request.
We can also offer copper backing plates and bonding.
When asking for a quotation please inform about the desired size, purity, exact composition, geometrical shape and quantity.
